To remove contamination, modify or activate (increase chemical activity) the surfaces of products from high—tech areas without damaging them - such tasks are designed to solve the development of the resident of the technopark "Polyus", the company GN Electronics.
"The innovation of our installation is that we use a bipolar pulse generator developed by us to produce plasma. It creates short and frequent pulses, which allows you to increase the concentration of ions. Additionally, in the intervals between pulses, a relatively low negative voltage is applied to the electrodes to give the ions the minimum energy necessary for processing. This ensures careful and efficient processing of sensitive semiconductor and quantum structures without increasing the temperature of the product," said Denis Vasiliev, a leading engineer at GN Electronics.
